POWERLASE Limited, manufacturers of the world’s most powerful nanosecond Q-switched, diode-pumped solid state (DPSS) lasers, today announces a research collaboration with leading European Academic Institution, University College Dublin (UCD). The research will further the development of Laser Produced Plasma (LPP) as an Extreme Ultraviolet (EUV) Lithography light source.
The aim of the research is to provide the industry with a proven, robust and cost effective laser product capable of providing a suitable light source for use in EUV Lithography. Researchers from UCD will use vacuum equipment, which has been provided by POWERLASE, to conduct a study of ion-emissions of the LPP EUV source. The LPP EUV approach is now the most promising technology for the high volume manufacture of semiconductors at 32nm and below.
The latest development follows POWERLASE’s previously reported research collaborations in EUV Lithography with the Extreme Ultraviolet Lithography Association (EUVA) in Japan and leading US academics at the University of Central Florida (UCF). POWERLASE has supplied both organisations with Starlase lasers in order to further advance the EUV source development required for EUVL.
Dr Samir Ellwi, POWERLASE Vice President of Strategic Innovations comments: “POWERLASE is very excited to be working with the leading academics at UCD to support the development of Extreme Ultraviolet sources for next-generation lithography techniques. We believe the LPP source approach, which is driven by a diode pumped solid state laser, is the way forward in achieving the requirements for the EUV source. The technique also drives down cost of ownership (CoO) in comparison to other laser technologies. We are committed to providing the industry with a workable laser solution and supporting EUV development. The equipment that POWERLASE is providing to UCD will aid the University’s advancement and research in this area.”
Professor. Gerry O’Sullivan, Head of School of Physics at University College Dublin, comments: “Our work with POWERLASE will be extremely valuable in progressing the EUV research and development programme and strengthening our links with the major industrial players in this exciting and important field. We are dedicated to advancing next-generation lithography techniques and believe our work with POWERLASE will lead to significant breakthroughs in EUVL.”
Powerlase Limited is an innovative, independent, high power Laser Company, focused on Diode Pumped Solid State lasers developed for industrial applications primarily for use in the materials processing and microelectronics markets for flat panel displays, microelectronics, automotive and aerospace sectors.
POWERLASE is supported by venture capital from MTI Partners, Deutsche Venture Capital, Esprit Capital Partners LLP (formerly Cazenove Private Equity), Alice Ventures and FNI Venture Capital.
Powerlase Limited is ranked as the fifth fastest growing venture capital-backed company in the UK in the Daily Telegraph's Business Telegraph Growth Rankings.
University College Dublin UCD is a dynamic, modern university and is the largest university in Ireland. It is committed to becoming one of the leading research universities in the European Union, where cutting-edge research and scholarship will create a stimulating intellectual environment, the ideal surroundings for learning and discovery. UCD provides excellent facilities to support teaching and learning.
With a new academic structure of 5 Colleges and 35 Schools, UCD is Ireland's premier University offering a comprehensive range of undergraduate and postgraduate programmes in the humanities and sciences. Its student population is approximately 22,500, including 2,000 international students. Approximately 27% of the student body, more than 6,000 students are engaged in postgraduate study and research. The University is committed to maintaining a high level of research activity and to further developing its collaborative links with industry and commerce, and with educational and research institutions internationally.
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